| 反射式微光机电系统(MOEMS)的研究现状与展望 |
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| 引用本文： | 尤政,王子旸,任大海. 反射式微光机电系统(MOEMS)的研究现状与展望[J]. 光学技术, 2004, 30(2): 189-192 |
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| 作者姓名： | 尤政 王子旸 任大海 |
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| 作者单位： | 清华大学,精密仪器及机械学系,北京,100084 |
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| 摘 要： | 反射式微光机电系统是微光机电系统中的重要组成部分,近年来得到了较快的发展。介绍了反射式微光机电系统(MOEMS)的研究现状和最新进展。根据反射式微光机电系统的分类,列举了一些具有代表性的反射式MOEMS器件。简要介绍了反射式MOEMS的加工工艺;阐述了反射式MOEMS的应用领域;展望了发展前景。
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| 关 键 词： | 反射式微光机电系统 微光机电系统 微机电系统 |
| 文章编号： | 1002-1582(2004)02-0189-04 |
| 修稿时间： | 2003-08-19 |
Review and prospect on reflection mode micro-opto-electro-mechanical system |
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| YOU Zheng,WANG Zi-yang,REN Da-hai. Review and prospect on reflection mode micro-opto-electro-mechanical system[J]. Optical Technique, 2004, 30(2): 189-192 |
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| Authors: | YOU Zheng WANG Zi-yang REN Da-hai |
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| Abstract: | As an important part of MOEMS, reflection mode MOEMS has emerged as a research area developing at full speed. The status quo and up-to-the-minute progress of reflection mode MOEMS research are presented. Typical devices from every category of reflection mode MOEMS are examined. The regular micromachining techniques and main applications are outlined. The development trends of reflection mode MOEMS are discussed and analyzed. |
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| Keywords: | reflection mode MOEMS MOEMS MEMS |
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