Ion-beam sputtering of quartz samples: Material properties observed in the mass spectra of secondary ions

Matrix effects are analyzed in the secondary ion mass spectra of quartz samples and SiO₂ and SiO _x films. The spectral relations between Si⁺, O⁺, and Si _n O _m ⁺ ions and the corresponding atomic fragments of the matrix are discussed. Previously revealed correlations between the mass spectrum and the structural features of SiO₂ and SiO _x are analyzed via the kinetic models of ion mixing.