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High index low loss LiNbO3 waveguides
Affiliation:1. School of Physical Science and Technology, Superconducting and New Energy Center, Key Laboratory of Magnetic Levitation Technologies and Maglev Trains, Ministry of Education of China, Southwest Jiaotong University, Chengdu 610031, China;2. College of Physics and Energy, Fujian Normal University, Fuzhou 350117, China;3. College of Physical Science and Technology, Sichuan University, Chengdu 610064, China;1. Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science & Technology University, Beijing 100192, China;2. School of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin 300000 China;3. Beijing Laboratory of Optical Fiber Sensing and System, Beijing Information Science & Technology University, Beijing 100016, China;4. United Micro-Electronics Center Co. Ltd, Chongqing 401332, China;1. Nanostructures Engineering and Modeling Laboratory, Department of Metallurgical Engineering and Materials Science, Indian Institute of Technology Bombay, Mumbai, 400076, India;2. Centre for Advanced Studies, Lucknow, 226031, India;3. Nanostructures Engineering and Modeling Laboratory, Department of Metallurgical Engineering and Materials Science, Indian Institute of Technology Bombay-Monash Research Academy, Mumbai, 400076, India;4. Water Innovation Center: Technology Research & Education, Department of Metallurgical Engineering and Materials Science, Indian Institute of Technology Bombay, Mumbai, MH 400076, India
Abstract:We report the first fabrication, by a double proton exchange process (Double Exchange, DE) of planar LiNbO3 waveguides simultaneously presenting high index modifications (δne=0.11 at a wavelength of 632.8 nm) and losses as low as 0.4 dB/cm at the same wavelength. We also demonstrate the possibility of superimposing the DE process with titanium indiffusion (Titanium Indiffusion Double Exchange, TIDE) in order to realise high quality guides supporting both TE and TM modes, useful in phase-matched applications.
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