一种新型变面积电容式角度传感器的设计

介绍了一种电容极板固定于同一平面的变面积电容原理的非接触式角度传感器.传感器借助于多相激励信号源在极板上产生平面位置信号,通过过渡极板耦合形成对应于角位移信号的合成电场,利用合成信号与基准信号鉴相比较实现以角位移信号的测量.通过模型仿真和样品试验,验证了原理设计的可行性,并在误差分析基础上给出了减小误差的方法.传感器具有固定侧出线、低成本和测量区域及性能可拓展等特点.

Design of a New Angular Sensor Based on Area-Changing Capacitive Theory

A noncontact area-changing capacitive angular sensor is introduced whose boards are fixed on the same plane. The angle measurement is achieved by the phase demodulation between the synthesized signal and the benchmark signal. The measurement recurs to the plane position which is generated on the boards with the multiphase excitation signal source, and the synthesized electric field corresponding to angular displacement which is formed by the transition boards coupling. The feasibility of the design is validated by doing simulation and experiment based on the model. And then,some methods that can decrease the sensor errors are presented after the error analysis. The sensor is designed with fixed lateral,at a lower cost,and it can also get a better performance and larger measure area.