| 晶体的超精密抛光 |
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| 引用本文： | 谢会东,王晓青,沈光球. 晶体的超精密抛光[J]. 人工晶体学报, 2004, 33(6): 1035-1040 |
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| 作者姓名： | 谢会东 王晓青 沈光球 |
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| 作者单位： | 清华大学化学系,功能晶体与薄膜研究所,北京,100084 |
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| 摘 要： | 超光滑表面在现代科学技术中具有重要意义.超精密抛光技术是实现超光滑表面的主要方法.本文对超光滑表面的概念、影响超精密抛光质量的因素、几种超精密抛光方法及其所能达到的抛光效果、抛光效果的测量与评价方法等进行了介绍.同时描述了超精密抛光的发展阶段、现状和发展趋势.
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| 关 键 词： | 超光滑表面 超精密抛光 表面粗糙度 平面度, |
| 文章编号： | 1000-985X(2004)06-1035-06 |
Superpolishing of Crystals |
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| XIE Hui-dong,WANG Xiao-qing,SHEN Guang-qiu. Superpolishing of Crystals[J]. Journal of Synthetic Crystals, 2004, 33(6): 1035-1040 |
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| Authors: | XIE Hui-dong WANG Xiao-qing SHEN Guang-qiu |
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| Abstract: | Supersmooth surfaces are of great importance to the modern science and technology. Superpolishing techniques are main ways to make supersmooth surfaces. The definition of supersmooth surfaces and the factors influencing the superpolishing quality are presented in this paper. The feature, the level achieved, the measurements and evaluation of the superpolishing techniques are introduced briefly. In addition, the past, present and future of the superpolishing techniques are detailed. |
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| Keywords: | supersmooth surfaces superpolishing surface roughness flatness |
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