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Determination of layer thickness by auger electron spectroscopy
Affiliation:1. School of Earth Sciences, University of Bristol, Wills Memorial Building, Queens Road, Bristol BS8 1RJ, United Kingdom;2. Helmholtz Centre Potsdam, GFZ German Research Centre for Geosciences, Telegrafenberg, Potsdam 14473, Germany;1. Center for Composite Materials and Structures, Harbin Institute of Technology, Harbin 150080, PR China;2. General Physics Institute RAS, Vavilov str. 38, Moscow 119991, Russia;3. National Research Nuclear University MEPhI, Moscow 115409, Russia;4. Key Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin 150080, PR China
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