Size-dependent magnetic properties of FeGaB/Al2O3 multilayer micro-islands

Recently, micrometer-size patterned magnetic materials have been widely used in MEMS devices. However, the self-demagnetizing action is significantly influencing the performance of the magnetic materials in many MEMS devices. Here, we report an experimental study on the magnetic properties of the patterned micro-scale FeGaB/Al₂O₃ multilayers. Ferromagnetic hysteresis loop, ferromagnetic resonance (FMR), permeability and domain behavior have been demonstrated by complementary techniques. Magnetic annealing was used to enhance the performance of magnetic multilayers. The comparisons among micro-islands with different sizes in the range of $200\mathrm{\mu }\text{m}～500\mathrm{\mu }\text{m}$ as well as full film show a marked influence of size-effect, the exchange coupling effect, and the different domain structures inside the islands.