| Au在Si-Si3N4界面的电学效应 |
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| 引用本文： | 李思渊,李寿嵩,王毓珍,张同军.Au在Si-Si3N4界面的电学效应[J].物理学报,1984,33(5):662-670. |
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| 作者姓名： | 李思渊 李寿嵩 王毓珍 张同军 |
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| 作者单位： | 兰州大学物理系 |
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| 摘 要： | 本文系统地研究了Au在Si-Si3N4界面的电学效应及其热处理行为,对MNS结构进行了电子能谱分析,并探讨了Au在界面处的作用机制。
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| 收稿时间： | 1983-02-23 |
THE ELECTRICAL EFFECTS OF GOLD AT THE SILICON NITRIDE-SILICON INTERFACE |
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| LI SZE-YUAN,LI SHOU-SONG,WANG YU-ZHEN and ZHANG TONG-JUN.THE ELECTRICAL EFFECTS OF GOLD AT THE SILICON NITRIDE-SILICON INTERFACE[J].Acta Physica Sinica,1984,33(5):662-670. |
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| Authors: | LI SZE-YUAN LI SHOU-SONG WANG YU-ZHEN and ZHANG TONG-JUN |
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| Abstract: | In this paper, the electrical effects of gold at the silicon nitride-silicon interface and the heat treatment behaviour of these effects are studied systematically. The results of electron spectroscopy analyses of the MNS structure are also presented. In addition, the action mechanism of gold at this interface is investigated. |
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