| 平行度垂直度测量仪中的自动调光控制 |
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| 引用本文： | 赵洪志,郝群,曹芒,李达成.平行度垂直度测量仪中的自动调光控制[J].光学技术,1996(5). |
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| 作者姓名： | 赵洪志 郝群 曹芒 李达成 |
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| 作者单位： | 清华大学精仪系 |
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| 摘 要： | 依据改变线性ＣＣＤ的积分时间可调节其曝光量的特点，将ＣＣＤ的曝光量即其输出的测量信号控制在某一可调的目标电平上，使得采用线阵ＣＣＤ的平行度垂直度测量仪能够在很大的测量范围内准确测量，而不会出现ＣＣＤ饱和等现象。
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| 关 键 词： | 线阵 CCD 积分时间 平行度／垂直度 |
An automatic light-tuning control scheme for measuring parallelism and prependicularity of large workpieces |
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| Zhao Hongzhi,Hao Qun,Cao Mang,Li Dacheng.An automatic light-tuning control scheme for measuring parallelism and prependicularity of large workpieces[J].Optical Technique,1996(5). |
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| Authors: | Zhao Hongzhi Hao Qun Cao Mang Li Dacheng |
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| Abstract: | This paper describes a kind of automatic light tuning scheme for measuring parallelism and prependicularity of large workpieces. The integral time of line array CCD is adjusted to make the signal amplitude stable during the large measuring range. It is very important for measurement of parallelism and prependicularity of large workpieces in real condition. |
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| Keywords: | line array CCD integral time parallelism/perpendicularity |
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