|
|||||
|
|
Formation of boron-based films and boron nitride layers by CVD of a boron ester |
|
| Authors: | Sachdev Hermann Müller Frank Hüfner Stefan |
| Affiliation: | 1. Current address: Max Planck Institute for Polymer Research, Ackermannweg 10, 55128 Mainz;2. Allgemeine und Anorganische Chemie FR 8.1, Universit?t des Saarlandes, Postfach 151150, 66041 Saarbrücken (Germany);3. Experimentalphysik, Naturwissenschaftlich‐Technische Fakult?t II – Physik und Mechatronik, Universit?t des Saarlandes, 66041 Saarbrücken (Germany) |
| Abstract: | |
| Keywords: | boron chemical vapor deposition monolayers nitrides surface analysis |
| 本文献已被 PubMed 等数据库收录！ | |