A Linearized Method to Measure Dynamic Friction of Microdevices |
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| Authors: | A D Corwin M P de Boer |
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| Institution: | (1) MEMS Core Technologies Department, Sandia National Laboratories, Albuquerque, NM 87185, USA;(2) Present address: GE Global Research Center, Niskayuna, NY 12309, USA;(3) Present address: Mechanical Eng. Department, Carnegie Mellon University, Pittsburgh, PA 15213, USA |
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| Abstract: | We propose and evaluate a linearized method to measure dynamic friction between micromachined surfaces. This linearized method
reduces the number of data points needed to obtain dynamic friction data, minimizing the effect of wear on sliding surfaces
during the measurement. We find that the coefficient of dynamic friction is lower than the coefficient of static friction,
while the adhesive pressure is indistinguishable for the two measurements. Furthermore, after an initial detailed measurement
is made on a device type, the number of trial runs required to take the data on subsequent devices can be reduced from 200
to approximately 20. |
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| Keywords: | MEMS Dynamic friction Static friction Polysilicon Micromachine Tribology Friction |
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