| 原位溅射型单次试开密码鉴别电路 |
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| 引用本文： | 王宇航, 高杨, 韩宾, 等. 原位溅射型单次试开密码鉴别电路[J]. 强激光与粒子束, 2016, 28: 114101. doi: 10.11884/HPLPB201628.160140 |
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| 作者姓名： | 王宇航 高杨 韩宾 贾乐 |
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| 作者单位： | 1.西南科技大学 信息工程学院, 四川 绵阳 621 01 0;;;2.中国工程物理研究院 电子工程研究所, 四川 绵阳 621 999;;;3.重庆大学 新型微纳器件与系统技术国防重点学科实验室, 重庆 400044;;;4.核探测与核电子学国家重点实验室, 北京 1 00049 |
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| 摘 要： | 针对目前微机电系统密码锁中的鉴别器结构复杂、智能电子密码锁可靠性不高的问题，设计了一种N bit的原位溅射型单次试开密码鉴别电路。N bit的密码鉴别电路，由2N(N级、每级2个)个原位溅射型OFF-ON开关按照每级二选一的逻辑、N级级联的形式构成；将原位溅射型OFF-ON开关(OFF态到ON态的单向切换具有不可逆特性)与具有熔断特性的保险丝按照装定密码对应的电路关系进行连接，构成了原位溅射型单次试开固态密码锁，可将此密码锁用于对安全性要求高的要害系统、设施中。为了获得原位溅射型OFF-ON开关中金属爆炸箔与叉指电极之间的间隙，给出了三种固态密码鉴别电路的微加工工艺方案。
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| 关 键 词： | 微电子机械系统 原位溅射 鉴别电路 密码锁 单次试开 |
| 收稿时间： | 2016-05-17 |
| 修稿时间： | 2016-07-12 |
In-situ sputtering type single-try discriminator circuit |
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| Wang Yuhang, Gao Yang, Han Bin, et al. In-situ sputtering type single-try discriminator circuit[J]. High Power Laser and Particle Beams, 2016, 28: 114101. doi: 10.11884/HPLPB201628.160140 |
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| Authors: | Wang Yuhang Gao Yang Han Bin Jia Le |
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| Affiliation: | 1. School of Information Engineering,Southwest University of Science and Technology,Mianyang 621010,China;;;2. Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621999,China;;;3. National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology,Chongqing University,Chongqing 400044,China;;;4. State Key Laboratory of Particle Detection and Electronics,Institute of High Energy Physics,Chinese Academy of Sciences,Beijing 100049,China |
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| Abstract: | As the structure of discriminator in the current micro-electromechanical system combination lock is complex and the reliability of electronic combination locks is poor, we designed an N bit in-situ sputtering single-try discrimination circuit to solve these problems. The N bit discrimination circuit is composed of 2N (N-stage, two switches per stage) sputtering type OFF-ON switches and formed by alternative logic of each stage and N-stage series. The sputtering type OFF-ON switches (the one-way switch of the OFF state to ON state is irreversible) and the fuse having a fusing characteristic are connected by the corresponding relationship between setting password and the circuit to form in-situ sputtering and single-try solid combination lock which can be used in high security key systems and facilities. In order to ensure a space between the metal exploding foil and the interdigital electrode, three different micromachining process methods of the discrimination circuit are presented. |
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| Keywords: | micro-electro-mechanical systems sputtering discriminator circuit combination lock single-try |
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