原位溅射型单次试开密码鉴别电路

针对目前微机电系统密码锁中的鉴别器结构复杂、智能电子密码锁可靠性不高的问题，设计了一种N bit的原位溅射型单次试开密码鉴别电路。N bit的密码鉴别电路，由2N(N级、每级2个)个原位溅射型OFF-ON开关按照每级二选一的逻辑、N级级联的形式构成；将原位溅射型OFF-ON开关(OFF态到ON态的单向切换具有不可逆特性)与具有熔断特性的保险丝按照装定密码对应的电路关系进行连接，构成了原位溅射型单次试开固态密码锁，可将此密码锁用于对安全性要求高的要害系统、设施中。为了获得原位溅射型OFF-ON开关中金属爆炸箔与叉指电极之间的间隙，给出了三种固态密码鉴别电路的微加工工艺方案。

In-situ sputtering type single-try discriminator circuit

As the structure of discriminator in the current micro-electromechanical system combination lock is complex and the reliability of electronic combination locks is poor, we designed an N bit in-situ sputtering single-try discrimination circuit to solve these problems. The N bit discrimination circuit is composed of 2N (N-stage, two switches per stage) sputtering type OFF-ON switches and formed by alternative logic of each stage and N-stage series. The sputtering type OFF-ON switches (the one-way switch of the OFF state to ON state is irreversible) and the fuse having a fusing characteristic are connected by the corresponding relationship between setting password and the circuit to form in-situ sputtering and single-try solid combination lock which can be used in high security key systems and facilities. In order to ensure a space between the metal exploding foil and the interdigital electrode, three different micromachining process methods of the discrimination circuit are presented.