|
|||||
|
|
Modeling of coupling mechanisms and frequency separation in double disk resonators |
|
| Authors: | Christopher Grinde Tor A. Fjeldly |
| Affiliation: | 1. Vestfold University College, Faculty of Science and Maritime Studies, Institute for Micro- and Nano System Technologies, P.O. Box 2243, N-3103 Tonsberg, Norway;2. Department of Electronics and Telecommunication, Norwegian University of Science and Technology, University Graduate Center, Kjeller, Norway |
| Abstract: | We present modeling expressions for the coupling mechanisms in vertically stacked disk resonators. Using lumped modeling techniques, analytic expressions for coupling mechanisms in a stack of two disks are derived. The modeling results are compared to those of high-fidelity finite element analyses and show that the analytic expressions derived can be used to predict frequency separation between radial extensional modes. The established model is useful for gaining insight into parameter sensitivity when designing a stacked double disk resonator. |
| Keywords: | Micromachined resonators Coupling effects Lumped modeling Double disk resonator |
| 本文献已被 ScienceDirect 等数据库收录！ | |