| 微机械轮式陀螺仪的结构分析 |
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| 引用本文： | 郭宏宾,赵玉龙,蒋庄德.微机械轮式陀螺仪的结构分析[J].微纳电子技术,2007(Z1). |
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| 作者姓名： | 郭宏宾 赵玉龙 蒋庄德 |
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| 作者单位： | 西安交通大学精密工程研究所 西安710049(郭宏宾，蒋庄德)，西安交通大学机械制造系统工程国家重点实验室 西安710049(赵玉龙) |
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| 摘 要： | 以轮式陀螺仪为研究对象,利用有限元方法分析了主要结构尺寸对其固有频率的影响。根据驱动模态和敏感模态的频率匹配,优化了陀螺的结构尺寸;通过谐响应分析确定了频率和振幅的关系,为结构设计和制备工艺提供了理论指导。
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| 关 键 词： | 微机电系统 硅微机械陀螺 有限元方法 模态分析 谐响应分析 |
Structure Analysis of Vibrating Wheel Micro Mechanical Gyroscope |
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| GUO Hong-bin,ZHAO Yu-long,JIANG Zhuang-de.Structure Analysis of Vibrating Wheel Micro Mechanical Gyroscope[J].Micronanoelectronic Technology,2007(Z1). |
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| Authors: | GUO Hong-bin ZHAO Yu-long JIANG Zhuang-de |
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| Abstract: | The effect of primary structural dimensions on natural frequency of the vibrating wheel micro mechanical gyroscope was studied using finite element method(FEM) analysis.According to the match between drive mode frequency and sensing mode frequency,the structure dimensions of gyroscope were optimized.The relation between frequency and vibrating amplitude were researched by means of harmonic analysis,which provides help for structure design and fabrication process. |
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| Keywords: | MEMS micro silicon gyroscope finite element method modal analysis harmonic analysis |
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