| 溅射压强对TiN/SiNx纳米多层膜微观结构及力学性能的影响 |
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| 引用本文： | 安涛,王丽丽,文懋,郑伟涛. 溅射压强对TiN/SiNx纳米多层膜微观结构及力学性能的影响[J]. 物理学报, 2011, 60(1): 16801-016801 |
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| 作者姓名： | 安涛 王丽丽 文懋 郑伟涛 |
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| 作者单位： | (1)长春大学理学院,长春 130022; (2)长春大学理学院,长春 130022;吉林大学材料科学与工程学院,长春 130012; (3)吉林大学材料科学与工程学院,长春 130012 |
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| 基金项目： | 国家自然科学基金(批准号:50832001),吉林大学基本科研业务费(项目号:421060272467)资助的课题. |
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| 摘 要： | 利用磁控溅射方法在不同溅射压强条件下制备了TiN/SiNx纳米多层膜.多层膜的微观结构及力学性能分别用X射线衍射仪、原子力显微镜及纳米压痕仪来表征.结果表明随着溅射压强的增大,多层膜的界面变模糊,TiN层的择优取向由(200)晶面过渡到(111)晶面.与此同时,多层膜的表面粗糙度增大,硬度和弹性模量随溅射压强的增大而减小.多层膜力学性能的差异主要是由于薄膜的周期性结构及致密度存在差异所致.关键词：x多层膜')" href="#">TiN/SiNx多层膜界面宽度表面形貌
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| 关 键 词： | TiN/SiNx多层膜 界面宽度 表面形貌 |
| 收稿时间： | 2010-01-20 |
Influence of sputtering pressure on microstructure and mechanical properties of TiN/SiNx multilayer coatings |
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| An Tao,Wang Li-Li,Wen Mao,Zheng Wei-Tao. Influence of sputtering pressure on microstructure and mechanical properties of TiN/SiNx multilayer coatings[J]. Acta Physica Sinica, 2011, 60(1): 16801-016801 |
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| Authors: | An Tao Wang Li-Li Wen Mao Zheng Wei-Tao |
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| Affiliation: | College of Science, Changchun University, Changchun 130022, China;Department of Materials Science, Jilin University, Changchun 130012, China;College of Science, Changchun University, Changchun 130022, China;Department of Materials Science, Jilin University, Changchun 130012, China;Department of Materials Science, Jilin University, Changchun 130012, China |
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| Abstract: | TiN/SiNx multilayer coatings were deposited at different deposition pressure by reactive magnetron sputtering. The microstructure and mechanical properties of the coatings were characterized using X-ray diffraction (XRD), atomic force microscopy (AFM) and nanoindentation. The results showed that the layer structure became rough and the preferred orientation of TiN transferred from (200) to (111) plane with the increase of deposition pressure. Surface roughness of the coatings increased but the hardness and elastic modulus decreased with increasing deposition pressure. The variation of mechanical properties are attributed to the changes in layer structures and the densities of the coatings. |
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| Keywords: | TiN/SiNx multilayer coatings interface width topography |
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