| Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer |
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| 作者姓名： | 何国田 王向朝 曾爱军 唐锋 黄炳杰 |
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| 作者单位： | Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences，Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences，Shanghai Hengyi Optics & Fine Mechanics Co. Ltd.，Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences，Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai 201800 Graduate School of the Chinese Academy of Sciences Beijing 100039，Shanghai 201800 Graduate School of the Chinese Academy of Sciences Beijing 100039，Shanghai 201800，Shanghai 201800，Shanghai 201800 Graduate School of the Chinese Academy of Sciences Beijing 100039 |
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| 基金项目： | This work was supported by the National Natural Science Foundation of China (No.60578051)，the Science and Technology Committee of Shanghai (No.051107085 and 06QB14047). |
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| 摘 要： | To resolve the conflict of large measurement range and high accuracy in the existing real-time displacement measurement laser diode (LD) interferometers,a novel real-time displacement measurement LD interferom- etry is proposed and its measurement principle is analyzed.By use of a new phase demodulation algorithm and a new phase compensation algorithm of real-time phase unwrapping,the measurement accuracy is im- proved,and the measurement range is enlarged to a few wavelengths.In experiments,the peak-to-peak amplitude of the speaker vibration was 2361.7 nm,and the repeatability was 2.56 nm.The measurement time was less than 26μs.
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