掠出射X射线荧光谱仪性能评测

通过对GaAs(100)抛光晶片在相同条件下掠出射X射线荧光实验的可重复性研究,并结合常规光源与同步辐射光源X射线掠出射荧光实验结果的对比,证明自行研制的掠出射X射线荧光平台可重复性较好,稳定性较高,实验方法的设计是合理的。理论计算与实验曲线符合的较好,证明掠出射X射线荧光实验中用单晶的全反射临界角标定掠出射角度的方法是可行的。用标准晶片掠出射X射线荧光曲线的微分评测了实际角发散度的大小。

Performance Evaluation of the Grazing-Exit X-Ray Fluorescence Spectrometry

The self-produced grazing-exit X-ray fluorescence platform is proved with high repetition and stability,and the design of experimental arrangement is reasonable,by studying the repetition of grazing-exit X-ray fluorescence experiment on GaAs(100) polishing wafer under the same condition,and comparing with experimental results with conventional X-ray source and synchrotron light source.The experimental curve fits quite well with the theoretical one,which indicates that the method using the critical angle of total reflection of monocrystal to calibrate the grazing-exit angle is feasible.Practical divergent angle is evaluated by the derivative of the standard wafer's grazing-exit X-ray fluorescence curve.