Optical readout method for microcantilever array sensing and its sensitivity analysis |
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| Authors: | Miao Zhengyu Zhang Qingchuan Guo Zheying Wu Xiaoping Chen Dapeng |
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| Institution: | Chinese Academy of Science Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei. |
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| Abstract: | An optical readout platform using a knife-edge filter for detecting the bending of a bimaterial microcantilever array is established, and the influence of stress-induced micromirror deformation on the optical detection sensitivity is discussed. The influence of deformation is modeled theoretically and validated experimentally. Analysis shows that the optical detection sensitivity will decrease by 50% when the mirror has a deformation of lambda/5 (lambda is the wavelength of readout light). Finally, an infrared image is obtained by the platform. |
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