压电微悬臂梁微弱压电信号检测

压电微悬臂梁是一种利用压电元件的逆压电效应驱动微悬臂梁使其振动，并利用压电元件的压电效应来检测梁的变形量的集成微驱动器和微传感器。文中讨论了压电微悬臂梁中的压电元件的两种等效电路模型，并且提出了检测微压电信号的检测系统以及两种前放电路。在检测微悬臂梁频率响应特性的实验中得到了较好的结果。

Measurement of the Weak Signal from the Piezoelectric Microcantilever

Piezoelectric microcantilevers are widely used in MEMS, uitilizing a piezoelectric layer for oscillating and detection of signals. In this paper two kinds of equivalent circuits of the piezoelectric microcantilever are discussed. In the equivalent circuits, the oscillating excitation has been taken into account. To measure the signal from the piezoelectric microcantilever, a measuring system and two kinds of preamplifier circuits, differential charge amplifier and differential current amplifier have been constructed. The system and the circuits have been successfully applied to measure the frequency response of the cantilever.