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| 硅薄膜晶化机制的光学分析 | |
| 引用本文： | 张丽伟,周伶俐,李瑞,卢景霄,李红菊,王红娟,谷锦华,杨仕娥.硅薄膜晶化机制的光学分析[J].人工晶体学报,2007,36(2):344-347,367. |
| 作者姓名： | 张丽伟 周伶俐 李瑞 卢景霄 李红菊 王红娟 谷锦华 杨仕娥 |
| 作者单位： | 1. 郑州大学材料物理教育部重点实验室,郑州,450052;新乡师范高等专科学校,新乡,453000 2. 新乡师范高等专科学校,新乡,453000 3. 河南工业大学,郑州,450001 4. 郑州大学材料物理教育部重点实验室,郑州,450052 |
| 基金项目： | 国家基础研究国家重点基础研究发展规划(973计划) |
| 摘 要： | 采用拉曼光谱和分光光度计等测试手段,对快速光热过程(RTP)和常规炉过程(CFP)退火后的硅薄膜结构性能和光学性能进行了研究。用Avrami-Mehl-Johnson和Monte Carlo晶体生长模型和黑体辐射理论分析得出,RTP法退火温度低、速度快的原因,是RTP中不仅存在“光量子效应”,而且还存在“光热相长效应”。由光学带隙的计算得知,RTP退火法可使带隙约为1.7eV的非晶硅薄膜变为带隙约为1.28eV的微晶硅薄膜,说明RTP退火达到了较好的结晶效果。 |
| 关 键 词： | 拉曼光谱 硅薄膜 |
| 文章编号： | 1000-985X（2007）02-0344-04 |
| 修稿时间： | 2006-11-132006-12-20 |
Optical Analysis of Crystalline Mechanics of Silicon Thin Film Annealed by RTP |
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| ZHANG Li-wei,ZHOU Ling-li,LI Rui,LU Jing-xiao,LI Hong-ju,WANG Hong-juan,GU Jin-hua,YANG Shi-e.Optical Analysis of Crystalline Mechanics of Silicon Thin Film Annealed by RTP[J].Journal of Synthetic Crystals,2007,36(2):344-347,367. | |
| Authors: | ZHANG Li-wei ZHOU Ling-li LI Rui LU Jing-xiao LI Hong-ju WANG Hong-juan GU Jin-hua YANG Shi-e |
| Institution: | 1. Key Laboratory of Material Physics,Ministry of Education,Zhengzhou University,Zhengzhou 450052 ,China; 2. Xinxiang Teachers College, Xinxiang 453000, China ;3. Henan Univevsity of Technology, Zhengzhou 450001, China |
| Abstract: | The structural and optical performances of the samples prepared by PECVD,subsequently annealed by RTP or CFP were studied through Raman and spectrophotometer measurements.The results show that there is so-called "optical-thermal positive effect" as well as "optical quantum effect" in RTP process.The reason of the RTP with advantages both short annealing time and lower annealing temperature has been analyzed in detail through the Avrami-Mehl-Johnson model,Monte Carlo model and blackbody theory.With calculation of their bandgap,we can get a conclusion that microcrystalline samples with a bandgap of about 1.28eV can be get from a-Si samples with bandgap of about 1.7eV through RTP annealing,which indicates that RTP have better effect of recrystallization annealing. |
| Keywords: | RTP CFP |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |