A reversion of atomic segregation under ion bombardment of Nix Pdy alloys

The angular distribution of atoms sputtered from Ni_xPd_y alloys (x, y=1, 5) under 3 and 10 keV Ar⁺ ion bombardment has been studied experimentally and using computer simulations. A collector technique combined with RBS to analyze the distribution of collected material was used. It was found that the Pd/Ni yield ratio increases with the polar ejection angle θ for all targets excluding NiPd₅. This peculiarity of sputtering was explained by a reversion of atomic segregation at high initial concentrations of Pd atoms in the target.