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Real time study of the change in surface composition of insulators under electron bombardment |
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| Authors: | A Klekamp K J Snowdon W Heiland |
| Institution: | 1. Universit?t Osnabrück, Fachbereich Physik , Postfach 4469, D-4500 , Osnabrück , F.R.G.;2. Universit?t Stuttgart, 4. Physikalisches Institut , Pfaffenwaldring 57, D-7000, Stuttgart 80 , F.R.G.;3. Universit?t Osnabrück, Fachbereich Physik , Postfach 4469, D-4500 , Osnabrück , F.R.G. |
| Abstract: | Abstract We present a new real time technique to study the change in surface composition of solids, particularly insulators, due to electron bombardment. Secondary Ion Mass Spectrometry is used to monitor the surface composition during erosion by an electron beam. The technique is illustrated for LiNbO3 and NaCl targets. We observe a preferential loss of oxygen in the case of LiNbO3 and an alkali-metal enriched surface layer for NaCl. |
| Keywords: | electron bombardment surface composition SIMS preferential sputtering insulators |