MC model of Auger spectra from highly charged ion beam surface interaction

Abstract

A Monte Carlo code is described which simulates angle resolved Auger electron energy spectra from highly charged ion surface interaction. The combined effect of the Doppler spread of laboratory emission energy and electron scattering by the solid, together with the broad inherent line width, is found to have considerable influence on the spectral lines. As a new feature, low or high energy shoulders can appear. By comparison between simulated and measured spectra information on the kinematic and electronic state of the projectile ions in the moment of electron emission can be extracted. The standard method of spectrum analysis, which is based on the assumption of direct escape of the electrons, is evaluated with respect to the simulated spectra.