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Backscattering and sputtering with the monte-carlo program TRIM.SP |
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| Authors: | W Eckstein |
| Institution: | Max-Planck-Institut für Plasmaphysik, EURATOM Association , D-85748, Garching, München, Germany |
| Abstract: | Abstract The changes of the program TRIM.SP namely the vectorization and other minor changes since its first publication in 1984 are shortly described. Examples especially about backscattering and sputtering illustrate the possibilities which can be handled by the program. |
| Keywords: | |