Unique ion beam scattering technique on depth profile determination |
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| Authors: | D Fink PF P Fichtner |
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| Institution: | 1. Hahn-Meitner-Institut , Dept. P-3, D-1000 Berlin 39, Glienickerstr. , 100 , Germany;2. Instituto de Fisica, Universidade Federal do Rio Grande do Sul, Campus do Vale , 90049 , Porto Alegre , RS, Brazil;3. presently at: KFA Jülich, Germany |
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| Abstract: | Abstract By combination of energy and time of flight detection in ERDA or NRA measurement, the particles' masses can be determined, additionally to the depth information. This leads to unique depth profile determination even for complex targets. Combination with th concept of Jacobi transformations results in extremely fast measurements. In this paper, a way is shown how this concept can be realized even for accelerators ofenergies as low as about 1 MeV. |
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| Keywords: | Depth Profile analysis RBS ERDA NRA coincidence time-of-flight atomic mass separation complex targets |
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