The influence of incidence angle on disorder production in Cl and Ar ion implanted Si

Abstract

Cl and Ar ions have been implanted, at 30 keV and at various incidence angles, into Si substrates maintained at room temperature during implantation. Implantation induced Si disorder was measured using RBS channelling. The effects upon disorder of various incidence angles were studied over a fluence range of 10¹²-6·10¹⁵ ions·cm^?2

The results show that, at low fluences Cl and Ar ion implantations generate a bimodal disorder-depth profile, whilst at higher fluences measurements of amorphised layer thickness as a function of ion incidence angle allow values of the standard deviation of the disorder profile parallel and transverse to the ion beam direction for each ion to be obtained with good agreement to theoretical predictions. The disorder-fluence behaviour under these conditions is ion species independent.