| Ar等离子体处理PET在非晶硅太阳电池中的应用 |
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| 引用本文： | 倪牮.Ar等离子体处理PET在非晶硅太阳电池中的应用[J].光电子．激光,2009(11):1417-1421. |
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| 作者姓名： | 倪牮 |
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| 作者单位： | 南开大学光电子薄膜器件与技术研究所; |
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| 基金项目： | 国家高技术研究发展计划资助项目(2009AA05Z422); 天津市应用基础及前沿技术研究计划资助项目(08JCZDJC22200); 国家重点基础研究发展规划“973”资助项目(2006CB202602,2006CB202603); 天津市国家科技计划配套资助项目(07QTPTJC29500) |
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| 摘 要： | 在射频等离子体增强化学气相沉积(RF-PECVD)系统的腔室内,对聚对苯二甲酸乙二醇酯(PET)塑料薄膜进行Ar等离子体预处理,并采用光发射谱(OES)对不同处理参数下的氩气辉光状态进行在线监测。对处理前后PET及PET/ITO进行透过谱、原子力显微镜(AFM)以及扫描电镜(SEM)的测试结果表明,Ar等离子体处理改善了PET塑料薄膜的表面形貌,使之更适合ITO薄膜的生长。以Ar等离子体处理的PET/ITO为衬底,在沉积温度为125℃条件下,制备出效率为5.4%的p-i-n型非晶硅(a-Si)柔性太阳电池。
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| 关 键 词： | 塑料衬底 聚对苯二甲酸乙二醇酯(PET) Ar等离子体处理 柔性太阳电池 |
Surface modification of polyethylene terephthalate substrate by argon plasma treatment and its application to amorphous silicon solar cells |
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| NI Jian.Surface modification of polyethylene terephthalate substrate by argon plasma treatment and its application to amorphous silicon solar cells[J].Journal of Optoelectronics·laser,2009(11):1417-1421. |
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| Authors: | NI Jian |
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| Institution: | NI Jian,ZHANG Jian-jun,CAO Li-ran,LI Lin-na,SUN Jian,GENG Xin-hua,ZHAO Ying(Institute of Photo-electronic Thin Film Devices , Technique,Nankai University,Tianjin 300071,China) |
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| Abstract: | Polyethylene terephthalate(PET)films are treated by argon plasma in the chambers of RF-PECVD system.In situ optical emission spectroscopy(OES)measurements are used to study the influence of different treatment parameters(discharge power,pressure)on the intensity of glow discharge.The measurement results of transmittance spectra,AFM,SEM show that the surface morphology of PET films and the properties of PET/ITO films are both improved.Finally,single junction a-Si:H solar cells with p-i-n superstrate type on ... |
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| Keywords: | plastic substrates Polyethylene terephthalate(PET) Ar plasma treatment flexible solar cells |
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