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Fabrication of fine-pitch TiO2-organic hybrid dot arrays using multi-photon absorption of femtosecond pulses
Authors:H.?Segawa  author-information"  >  author-information__contact u-icon-before"  >  mailto:hsegawa@eco.tokushima-u.ac.jp"   title="  hsegawa@eco.tokushima-u.ac.jp"   itemprop="  email"   data-track="  click"   data-track-action="  Email author"   data-track-label="  "  >Email author,S.?Matsuo,H.?Misawa
Affiliation:(1) Laboratoire Traitement du Signal et Instrumentation, UMR 5516 CNRS, Université Jean Monnet, 23 rue Michelon, 42023 Saint-Etienne Cedex 2, France;(2) Laboratoire de Tribologie et Dynamique des Systèmes, UMR 5513 CNRS, ECL-ENISE, 58 rue Jean Parrot, 42023 Saint-Etienne Cedex 2, France
Abstract:Surface corrugation has been photo-induced in a single-step process in hybrid sol-gel thin films. A model based on elastic deformation under photo-induced stress is developed to explain relief formation in this material. Computation is carried out with finite-element software. Theoretical and experimental values of relief amplitude variation with film thickness and grating period agree for small deformations. Mass transfer from illuminated to non-illuminated areas has to be associated with the elastic model to account for surface corrugation in the case of large photo-induced deformation. A comparison with a fluid mechanics model is presented. PACS 81.65.C; 81.20.F; 81.40.L
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