Influence of the parameters of plasma-induced decomposition of tetramethylsilane on the chemical and phase compositions and particle size of resulting silicon carbide期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

Influence of the parameters of plasma-induced decomposition of tetramethylsilane on the chemical and phase compositions and particle size of resulting silicon carbide

Authors:	V. I. Berestenko E. N. Kurkin V. I. Torbov I. A. Domashnev

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