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High-speed deposition of RE123 film with large current capacity by hot-wall type PLD system
Authors:M Igarashi  K KakimotoT Hayashida  Y HanadaS Fujita  K MoritaN Nakamura  S HanyuY Sutoh  H KutamiY Iijima  T Saitoh
Institution:Fujikura Ltd., 1440 Mutsuzaki, Sakura, Chiba 285-8550, Japan
Abstract:We have studied a hot-wall heating system to produce GdBa2Cu3Oy (GdBCO) films with large critical currents (Ic) at a high production rate by a pulsed-laser-deposition (PLD) method. GdBCO films fabricated at a production rate of 30 m/h under the optimized conditions, especially a distance of 95 mm between the target and the substrate (T–S), exhibited high critical current densities (Jc) of about 3 MA/cm2 and Ic over 300 A at a thickness of 1–2 μm. Furthermore, long GdBCO tapes prepared by repeated depositions at each tape-passing speed of 80 m/h showed uniform Ic distribution along the longitudinal direction, because the hot-wall system enabled to stabilize temperature within a few degrees at 800 °C. A 170 m long tape with Ic over 600 A was successfully fabricated at a production rate of 16 m/h using a laser power of 360 W.
Keywords:Pulsed-laser-deposition (PLD)  Hot-wall heating  Critical current (Ic)
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