| Moisture absorption characteristics of a SiO2 film from 2 to 3 μm |
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| 作者姓名： | 崔云 李豪 易葵 邵建达 |
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| 作者单位： | Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences |
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| 基金项目： | supported by the National Natural Science Foundation of China under Grant No.61405225 |
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| 摘 要： | We prepare SiO2 coatings on different substrates by either electron-beam evaporation or dual ion-beam sputtering. The relative transmittances of the Si O2 coatings are measured during the heating process. The Si O2 coating microstructures are studied. Results indicate that the intensity and peak position of moisture absorption are closely related to the microstructures of the coatings. The formation of microstructures depends not only on the preparation process of the coatings but also on the substrate characteristics.
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| 关 键 词： | sputtering evaporation moisture heating prepare roughness diameters sizes stretching dense |
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