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激光烧蚀Cu靶产生等离子体紫外段发射光谱的研究
引用本文:吴立志,沈瑞琪,徐姣,叶迎华,胡艳. 激光烧蚀Cu靶产生等离子体紫外段发射光谱的研究[J]. 原子与分子物理学报, 2010, 27(1): 117-122. DOI: 10.3969/j.issn.1000-0364.2010.01.021
作者姓名:吴立志  沈瑞琪  徐姣  叶迎华  胡艳
作者单位:南京理工大学化工学院,南京,210094
基金项目:973计划重大专项(61339010301)资助项目
摘    要:利用波长532nm,脉宽15ns的Nd:YAG 激光器作用于Cu靶上,研究了产生等离子体的紫外段(180 nm~300 nm)发射光谱。在局部热力学平衡条件下,采用Boltzmann图表法估算了等离子体的电子温度,得到了电子温度随时间和空间的变化,以及电子温度随激光能量密度的变化。结果显示,随着激光能量的变化,电子温度有一个极大值。随着时间的发展,电子温度先减小,而后增大,接着缓慢减小。随着距靶面距离的增加,电子温度呈下降趋势。

关 键 词:激光烧蚀;Cu等离子体;局部热力学平衡;电子温度

Ultraviolet spectroscopic study of laser-induced Cu plasmas
WU Li-Zhi,SHEN Rui-Qi,XU Jiao,YE Ying-Hua,HU Yan. Ultraviolet spectroscopic study of laser-induced Cu plasmas[J]. Journal of Atomic and Molecular Physics, 2010, 27(1): 117-122. DOI: 10.3969/j.issn.1000-0364.2010.01.021
Authors:WU Li-Zhi  SHEN Rui-Qi  XU Jiao  YE Ying-Hua  HU Yan
Abstract:Ultraviolet (180 nm~300 nm) spectra of laser-induced Cu plasmas is studied using 532 nm, 15 ns pulses from a Nd:YAG laser. Boltzmann diagram method is used to calculate the electron temperature by assuming LTE conditions. The relations between electron temperature and laser fluence is acquired. Also space- and time-resolved measurements of electron temperature have been carried out using emission lines of copper plasma. The result shows that the temperature has a maximum value as laser fluence varies. Time evolutions of temperature are found to decay at early times, then a rise appears. After the rise, the temperature decreases at a slow speed. Spatial variation of temperature shows a flat drop as distances from the target surface increases.
Keywords:Laser ablation   Cu plasma   LTE   Electron temperature
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