| 一种高精度光学位移传感器的设计分析 |
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| 引用本文： | 王体辉,贺正权,王忠厚,李育林,张向东,方家美.一种高精度光学位移传感器的设计分析[J].光子学报,2003,32(7):840-843. |
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| 作者姓名： | 王体辉 贺正权 王忠厚 李育林 张向东 方家美 |
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| 作者单位： | 中国科学院西安光学精密机械研究所,西安,710068 |
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| 摘 要： | 利用晶体双折射和由散射偏振引起的光学干涉技术,设计出一种高精度光学位移传感器.该传感器采用同轴光学系统,测量精度约为4 μm,测量范围不小于28 mm,且测量时不需要使用相干光源,故结构紧凑、性能稳定.
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| 关 键 词： | 双折射 偏振 干涉 位移传感器 |
| 收稿时间： | 2002/9/4 |
| 修稿时间： | 2002年9月4日 |
Design of a High-precision Displacement Sensor |
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| Wang Tihui,He Zhengquan,Wang Zhonghou,Li Yulin,Zhang Xiangdong,Fang Jiamei.Design of a High-precision Displacement Sensor[J].Acta Photonica Sinica,2003,32(7):840-843. |
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| Authors: | Wang Tihui He Zhengquan Wang Zhonghou Li Yulin Zhang Xiangdong Fang Jiamei |
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| Institution: | Xi′an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi′an 710068 |
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| Abstract: | Based on birefringent interference high precision displacement sensor is designed. A laser beam emitting from a build-in LD in the sensor points to the detected surface, and the dispersed light goes through the optical lenses and a birefringent crystal. The ordinary ray and extraordinary ray from the crystal interfere at a detector. As the distance from the sensor to a target changes, the interference fringes shift. By detecting movement of the fringes, the displacement can be calculated. Precision of the sensor can achieve micron. |
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| Keywords: | Birefringence Polarization Interference Displacement sensor |
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