我国化学气相沉积(CVD)金刚石膜研究三十年

从1980年代化学气相沉积(CVD)金刚石膜问世,我国研究人员迅速跟进,在短时间内从国家层面进行布局,“863计划”从1987年启动到2016年落幕。在我国科学技术需要急起直追的年代,“863计划”的实施有力推动了我国CVD金刚石膜技术的进步,直至今天国家重点研发计划仍然在接力支持CVD金刚石在各个领域的应用研究。回顾CVD金刚石三十年的发展历程,对我国科技战略的设计、科技政策的制定、科研计划的落实、科技成果的实施等有重要的借鉴意义。

Thirty Years of Chemical Vapor Deposition (CVD) Diamond Films Research in China

Since the advent of the chemical vapor deposition (CVD) diamond film 1980s, Chinese researchers quickly follow up in a short time from the national level layout. In the era when China's science and technology need to catch up, the implementation of the “863 Program” has strongly promoted the progress of the CVD diamond film technology in China from 1987 to 2016. Until now, the national key research and development program is still supporting the application research of CVD diamond in various fields. The review of the development of CVD diamond film in the past 30 years has important reference significance for the design of science and technology strategy, the formulation of science and technology policy, the implementation of scientific research plan and the implementation of scientific and technological achievements in China.