Thermal conductivity of nanoscale polycrystalline ZnO thin films |
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Authors: | Zheng Xing Huang Zhen An Tang Jun YuSuyuan Bai |
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Affiliation: | School of Electronic Science and Technology, Dalian University of Technology, A416 Chuangxinyuan Building, No. 2 Linggong Road Dalian, Liaoning 116024, China |
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Abstract: | Thermal conductivities (TCs) of ZnO thin films of thickness 80-276 nm prepared by sol-gel method are measured by the transient thermoreflectance (TTR) system. The obtained TCs ranging from 1.4 to 6.5 W/m K decrease while the thickness decrease. The measured TCs are much smaller than those of bulk ZnO, which is about 100 W/m K. The possible reasons for the decrease are the grain boundary and defects. The latter is the dominating one from the analysis. |
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Keywords: | ZnO Thin film Thermal conductivity Transient thermoreflectance |
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