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Optical properties and microstructure of Ta_2O_5 thin films prepared by oblique angle deposition |
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| Authors: | Xiudi Xiao Guoping Dong Hongbo He Hongji Qi Zhengxiu Fan Jianda Shao |
| Institution: | 1. Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;Graduate University of Chinese Academy of Sciences,Beijing 100049,China 2. Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China 3. Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;Shanghai Daheng Optics and Fine Mechanics Co.,Ltd.,Shanghai 201800,China |
| Abstract: | Tantalum pentoxide thin films are prepared by oblique angle electron beam evaporation.The influence of flux angle on the surface morphology and microstructure is investigated by scanning electron microscopy (SEM).The Ta_2O_5 thin films are anisotropic with highly orientated nanostructure of slanted columns. The porous microstructure of the as-deposited films results in the decrease of effective refractive index and packing density with increasing deposition angle.The anisotropic structure results in optical... |
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