Electrodynamic theory for near-field microwave microscopy of plane-layered structures and its application to metrology of thin dielectric films |
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| Authors: | A. N. Reznik V. V. Talanov I. A. Shereshevsky N. K. Vdovicheva |
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| Affiliation: | (1) Institute for Physics of Microstructures, Russian Academy of Sciences, GSP-105, Nizhny Novgorod, 603950, Russia;(2) Solid State Measurements, 110 Technology Drive, Pittsburgh, PA, USA |
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| Abstract: | A theory for near-field microwave microscopy of plane-layered structures has been developed. The probe of a near-field microscope is considered as electrically small antenna, which emits quasi-static fields and waves in a medium with an arbitrary 1D permittivity profile. The accuracy of the theory has been demonstrated by microscopy of thin dielectric films deposited on a conductive substrate. The possibility of determining film permittivity with an error of 5–7% is shown. |
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