Computer analysis of the source image structure in 3D electron-optic systems: I. An electrostatic system

Computer analysis of the arbitrary source image obtained in 3D electron-optic systems is performed. The systems involve electrostatic fields focusing and deflecting electron beams. Specifically, the structure of a net electron beam from an extended source at the crossover is examined. It is shown that the spread function of the source, which characterizes the imaging quality of the system most fully, may serve as a primary computational criterion.