| 数字化玻璃表面检测系统的研究 |
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| 引用本文： | 莫卫东,冯金高. 数字化玻璃表面检测系统的研究[J]. 光子学报, 2001, 30(5): 618-623 |
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| 作者姓名： | 莫卫东 冯金高 |
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| 作者单位： | 空军工程大学,工程学院, |
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| 基金项目： | 国家 8 63计划资助!项目 (“激光陀螺研制”） |
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| 摘 要： | 本研究把传统光学方法与现代数字化图象技术相结合,运用先进的数字化图象处理手段和Zernike多项式拟合干涉波面方法进行干涉图象的计算,并在理论上有较大的突破,从而可快速准确测量出光学平面玻璃表面的平整度以及对其它技术指标的定量评定.本研究所架构的光学平面玻璃表面检测系统的精度达到了λ/100,灵敏度为λ/1000.
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| 关 键 词： | 干涉仪 数字图象处理 Zernike多项式拟合 平面玻璃表面 |
| 收稿时间： | 2000-08-25 |
| 修稿时间： | 2000-08-25 |
A SYSTEM TO INSPECT SURFACE OF OPTICAL PLANE GLASS WITH QUANTIZING TECHNIQUE |
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| Mo Weidong,Feng Jinfu. A SYSTEM TO INSPECT SURFACE OF OPTICAL PLANE GLASS WITH QUANTIZING TECHNIQUE[J]. Acta Photonica Sinica, 2001, 30(5): 618-623 |
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| Authors: | Mo Weidong Feng Jinfu |
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| Affiliation: | University of Engineering of Air Force, Xi’an China 710038 |
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| Abstract: | The research is to unite traditional optical method with modern quantizing image technique,and to calculate interferogram using the advance quantizing image processing means and fitting interferogram method with Zernike polynomials so that the evenness and other technical parameters of surface of optical plane glass can be quickly and precisely measured.Using results of the research in the system to inspect surface of plane glass,the repeatability of the system is about λ／100 and sensitivity reaches about λ/1000. |
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| Keywords: | Interferometer Processing quantizing image Zernike polynomials Plane glass surface |
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