一种新的铁电薄膜快速热处理工艺的研究

使用一种新的快速热处理的方法制备出Pb(Zr0.52Ti0.48)O3(PZT)薄膜，该方法的主要设备为链式热处理炉，它主要分为三部分，即预热带、加热带和冷却带．溶胶的配制采用先通过减压蒸馏的方法得到干凝胶，再将干凝胶溶解在乙二醇甲醚中的方法得到．对干凝胶作了DSC-TG分析；对薄膜作了X-射线衍射分析，结果为纯的钙钛矿结构的晶相；在l0kHz时薄膜的相对介电常数为235，介质损耗小于0.02；C-V特性曲线以及P-E电滞回线显示薄膜具有良好的铁电性能．

STUDY ON A NEW AND RAPID HEAT-TREATMENT PROCESS FOR FABRICATING LEAD ZIRCONATE TITANATE THIN FILM

A new and rapid heat treatment process for fabricating lead zirconate titanate, Pb(Zr 0.52 Ti 0.48 )O 3(PZT), ferroelectric thin films was developed. The main equipment of this heat treatment process is termed caterpillar furnace. The furnace is composed of three parts, including preheating, heating and cooling. The precursor solution were prepared by using a modified sol gel process, in which solid precursors of PZT were prepared through reduced pressure distillation first, and then the precursor was dissolved in 2 methoxyethanol(2 MOE) to form the sols for the spin coating deposition. The precursor was investigated by DSC TG, and the PZT thin film was investigated by XRD. XRD analysis shows that the thin film possesses single phase perovskite type structure. A dielectric constant and loss tangent of thin film were 235 and 0.02 at 10KHz, respectively. The capacitance voltage(C V) and Hysteresis loops of PZT films show that the films possess fine ferroelectric properties.