| Abstract: | Isopropyl substituted poly(phenylene ether ether ketone) with a high molecular weight was prepared by nucleophilic substitution reaction of isopropyl-substituted difluoro diaryl ether with hydroquinone. This polymer was amorphous and soluble in common organic solvents, such as THF, chloroform, and cyclohexanone. Thermogravimetry of the polymer showed good thermal stability, indicating that a 10% weight loss of the polymer was observed at 470°C in nitrogen. The glass transition temperature of the polymer was 145°C. The polymer had a broad UV absorption band over 250–380 nm. The polymer acted as a photosensitive resist of negative type for UV radiation. The resist had a sensitivity of 40 mJ/cm2 and a contrast of 2.8, when it was developed with DMF at room temperature. © 1997 John Wiley & Sons, Inc. |
