| 集成微光机电系统中的矢量光学问题 |
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| 引用本文： | 李志远,杨国桢,顾本源. 集成微光机电系统中的矢量光学问题[J]. 物理, 2000, 29(2): 78-81 |
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| 作者姓名： | 李志远 杨国桢 顾本源 |
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| 作者单位： | 中国科学院物理研究所!北京100080 |
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| 摘 要： | 集成微光机电(MOEM) 系统是近年来迅速地发展起来的一门新兴的综合学科,它融合了微光学元件、微电子器件和微机械结构的优点.不但在技术上有重要的应用,还蕴涵着与小尺寸器件有关的力学、热学、电学、光学,以及材料科学等丰富的基础科学研究课题.文章探讨了MOEM 系统中典型的微光学元件,如衍射微透镜、折射微透镜和微光栅中的矢量光学问题,简要地介绍了相应的求解方法.
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| 关 键 词： | 集成微光机电系统 微光学元件 光的矢量衍射理论 |
VECTORIAL DIFFRACTION OF LIGHT IN MICRO-OPTO- ELECTRO-MECHANICAL SYSTEMS |
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| LI Zhi|Yuan YANG Guo|Zhen GU Ben|Yuan. VECTORIAL DIFFRACTION OF LIGHT IN MICRO-OPTO- ELECTRO-MECHANICAL SYSTEMS[J]. Physics, 2000, 29(2): 78-81 |
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| Authors: | LI Zhi|Yuan YANG Guo|Zhen GU Ben|Yuan |
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| Abstract: | Micro-opto-electro-mechanical systems(MOEMs) combine micro-optic,micro-electronic,and micro-mechanical elements into integrated devices.MOEMs promise wide technical applications as well as fruitful scientific problems concerning micro-devices.The propagation of light in micro-optic devices such as microgratings,diffractive microlenses,and refractive microlenses in MOEMs is discussed in detail.These problems must be solved by vectorial diffraction theory. |
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| Keywords: | MOEMs micro-optic elements vectorial diffraction theory of light |
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