Generating of quadratic gray scale beam profile using binary gray scale masks |
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Authors: | Arash Sabatyan Mohammad Reza Fasihanifard |
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Affiliation: | Physics Department, Faculty of sciences, Urmia University, Urmia, Iran |
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Abstract: | Generating beams with a desired quadratic lateral intensity distribution using 1D binary masks was analyzed, in detail. Effect of width of the first bar as well as the gray scale increment rate on the generated shaped beam was examined. It is shown that increasing the gray scale rate produces smoother and broaden profile. Besides, it was demonstrated that width of the first bar has great impact on the generated profile, so by increasing the width, the generated profile becomes sharper. Theoretical results are confirmed by experiment, as well. |
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Keywords: | Diffraction Binary and gray scale masks Gray scale photolithography Beam shaping |
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