Investigation of structural and optical properties of UHV deposited titanium thin films under thermal oxidation |
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Authors: | Saeid Rafizadeh |
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Institution: | Young Researchers Club, Urmia Branch, Islamic Azad University, Urmia, Iran |
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Abstract: | Titanium dioxide thin layers were prepared by annealing method, on glass substrate at different temperatures, 150, 250 and 350 °C, in presence of 5 cm3/s uniform oxygen flow. The structural investigations were performed by means of atomic force microscopy (AFM) and X-ray diffraction (XRD) techniques. Roughness of the films changed due to annealing process. The optical constants of the layers were obtained by Kramers–Kronig analysis of the reflectivity curves. There was a good agreement between structural and optical properties of the layers. Annealing temperature can play an important role in nanostructures of the films. |
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Keywords: | AFM XRD Kramers&ndash Kronig Spectrophotometry |
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