Error compensation of four and five buckets wavefront extraction algorithms in phase-shifting interferometer |
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| Authors: | Mingxin Zhu Fuzhong Bai Shiming Gan Kaizheng Huang Linhai Huang Jianxin Wang |
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| Institution: | 1. College of Mechanical Engineering, Inner Mongolia University of Technology, Huhhot 010051, China;2. The Laboratory on Adaptive Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China;3. College of Science, Southwest University of Science and Technology, Mianyang 621010, China |
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| Abstract: | The phase-shifting method is all along an important wavefront extraction technique in the interferometer. Moreover, to require almost real-time measurement an algorithm with a small number of grabbed buckets is very helpful to the phase-shifting interferometer. Therefore, those algorithms within five buckets are very practical and are given more attention. In the paper, popular phase shifting algorithms within five buckets are compared and new four and five buckets algorithms are developed to compensate for two dominate error sources which are linear phase shift deviation and detector nonlinearity. Numerical simulations and wavefront extraction experiment verify that the proposed compensation algorithms are insensitive to linear phase shift deviation and detector nonlinearity compared with classical four and five bucket algorithm. |
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| Keywords: | Phase-shifting algorithm Phase extraction Phase shift deviation Detector nonlinearity |
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