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精密宏微复合绝对式光栅尺设计与研究
引用本文:范朝龙,王晗,刘强,陈新度,郑俊威,梁烽. 精密宏微复合绝对式光栅尺设计与研究[J]. 应用光学, 2015, 36(2): 287-293. DOI: 10.5768/JAO201536.0205002
作者姓名:范朝龙  王晗  刘强  陈新度  郑俊威  梁烽
作者单位:1.广东工业大学 广东省微纳加工技术与装备重点实验室,广东 广州 510006
基金项目:国家自然科学基金(51305084);广东省引进创新科研团队专项(201001G0104781202);中国博士后科学基金
摘    要:通过对光栅尺原理的研究,设计一种宏微复合切换测量模式,利用增量码进行低精度测量,绝对码进行高精度测量。采用增量方式采集莫尔条纹的高速性,解决高精度绝对位置采集的低速性,实现宏微复合的高速与高精度的测量。实验证明,高精度低速绝对位置测量过程中测量精度可达0.6 m,在测量中使用新型高速与低速的变速切换测量方式,综合测量速度最高可以达到2 m/s。

关 键 词:绝对光栅尺   宏微复合   速度切换   精密

Design and research of precise macro/micro combined absolute optical encoder
Fan Zhaolong;Wang Han;Liu Qiang;Chen Xindu;Zheng Junwei;Liang Feng. Design and research of precise macro/micro combined absolute optical encoder[J]. Journal of Applied Optics, 2015, 36(2): 287-293. DOI: 10.5768/JAO201536.0205002
Authors:Fan Zhaolong  Wang Han  Liu Qiang  Chen Xindu  Zheng Junwei  Liang Feng
Affiliation:1.Guangdong Provincial Key Laboratory of Micro-nano Manufacturing Technology and Equipment,Guangdong University of Technology,Guangzhou 510006,China
Abstract:Through studying the theory of absolute optical encoder, we designed a macro/micro switch measurement . We used the incremental code for low precision measurement ,and the absolute code for high-precision measurement. The incremental acquisition method was used to acquire Moir fringe at a high rate of speed, which could solve the problem of low velocity when using precise absolute optical encoder, and implemented high-speed and high-precision measurement that was a combination of macro and micro. Experiment proves that the precision of high-precision low-speed measurement of absolute position can be up to 0.6 m, the used new-type model of high/low velocity switch measurement can make the comprehensive measurement speed up to 2 m/s.
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