Experimental study on parameters of dust plasma in SiH4/C2H4/Ar discharges |
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| Authors: | Wu Jing Zhang Peng-Yun Sun Ji-Zhong Zhang Jian Ding Zhen-Feng Wang De-Zhen |
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| Affiliation: | State Key Laboratory of Materials Modification by Laser,Ion and Electron Beam, School of Physics and OptoelectronicTechnology, Dalian University of Technology, Dalian 116024,China |
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| Abstract: | Measurements of dust plasma parameters were carried out in thedischarges of (SiH4/C2H4/Ar) mixtures. Dust particleswere formed in the capacitively coupled radio-frequency discharge ofthese reactive mixtures in a cylindrical chamber. Langmuir probe wasemployed for diagnosing and measuring the important plasmaparameters such as electron density and electron temperature. Theresults showed that the electron density dropped, and in contrastthe electron temperature rose when the dust particles formed. Thecurves of the electron density and temperature versus the RF powerand pressure were presented and analysed. Further, it was found thatthe variations of electron temperature and the size of dust voidwith the RF power followed the similar trends. These trends might beuseful for understanding more about the characteristics of dustyvoids. |
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| Keywords: | dust plasma dust void electrondensity electron temperature Langmuir probe |
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