Experimental study on parameters of dust plasma in SiH4/C2H4/Ar discharges |
| |
| Authors: | Wu Jing Zhang Peng-Yun Sun Ji-Zhong Zhang Jian Ding Zhen-Feng and Wang De-Zhen |
| |
| Institution: | State Key Laboratory of Materials Modification by Laser,
Ion and Electron Beam, School of Physics and Optoelectronic
Technology, Dalian University of Technology, Dalian 116024,
China |
| |
| Abstract: | Measurements of dust plasma parameters were carried out in the
discharges of (SiH4/C2H4/Ar) mixtures. Dust particles
were formed in the capacitively coupled radio-frequency discharge of
these reactive mixtures in a cylindrical chamber. Langmuir probe was
employed for diagnosing and measuring the important plasma
parameters such as electron density and electron temperature. The
results showed that the electron density dropped, and in contrast
the electron temperature rose when the dust particles formed. The
curves of the electron density and temperature versus the RF power
and pressure were presented and analysed. Further, it was found that
the variations of electron temperature and the size of dust void
with the RF power followed the similar trends. These trends might be
useful for understanding more about the characteristics of dusty
voids. |
| |
| Keywords: | dust plasma dust void electron
density electron temperature Langmuir probe |
| 本文献已被 维普 等数据库收录！ |
| 点击此处可从《中国物理 B》浏览原始摘要信息 |
| 点击此处可从《中国物理 B》下载免费的PDF全文 |
