EXPERIMENTAL STUDY OF DIFFRACTIVE PROPERTIES OF WAVELENGTH-SIZED SINGLE GROOVE IN Si-Si3N4 SUBSTRATE

Experimental results are presented for the diffractive properties of wavelength-sized single groove in Si-Si₃N₄ substrate. The experimental results show that the diffraction of wavelength-sized single grooves in a non-perfectly conducting material is more complex than that of perfectly conducting material. The diffraction intensities change with the change of polarization angle of the incident light. The diffraction intensities for TM polarization light are larger as the groove width is larger. The diffraction intensities of TM polarization light decrease gradually and that of TE polarization light increase gradually when the groove width is close to the wavelength of the incident light. The variations of diffraction intensities are quite different not only for various grooves with different widths but also for different diffraction angles for the same groove. Although the intensity variation of each diffraction order has a very regular sinusoidal dependence on the polarization angles of the incident light, the variation phase of each diffraction order is not all the same.